Measuring and inspection microscopes with different configurations for semiconductors / MEMS applications. They are characterized by the highest optical performance with fast and easy operation.
Inspection & Metrology
Promicron Inspections & Metrology Systems
- Fully automatic
- Flexible use
- For Inspection and Metrology
White Light Interference
Microscope equipment based on INM200/Ergoplan or DM8000 with interferometer hardware & software for topography measurement and export of 3D data.
Microscope confocal module as an upgrade for high resolution 3D Metrology.
Modular Software Suite MCS:
- Metrology (CD, confocal,...)
- Hardware control