Measuring and inspection microscopes with different configurations for semiconductors / MEMS applications. They are characterized by the highest optical performance with fast and easy operation.
Modular Software Suite MCS:
- Metrology (CD, confocal,...)
- Hardware control
Inspection & Metrology
Promicron Inspections & Metrology Systems
- Fully automatic
- Flexible use
- For Inspection and Metrology
White Light Interference
Microscope equipment based on INM200/Ergoplan or DM8000 with interferometer hardware & software for topography measurement and export of 3D data.
Microscope confocal module as an upgrade for high resolution 3D Metrology.
Inspection Microscope Leica DM8000 MCS. Modified mikroscope for VIS and IR Inspection in incident and transmitted light. Software for semi-automatic wafer & MEMS Inspection.