Microscopes

Measuring and inspection microscopes with different configurations for semiconductors / MEMS applications. They are characterized by the highest optical performance with fast and easy operation.

More Information

Software MCS

Modular Software Suite MCS:

  • Inspection
  • Review
  • Metrology (CD, confocal,...)
  • Hardware control

More Information

Inspection & Metrology

PROMIS
Promicron Inspections & Metrology Systems

  • Fully automatic
  • Flexible use 
  • For Inspection and Metrology

More Information



 

White Light Interference

PRO-WLI
Microscope equipment based on INM200/Ergoplan or DM8000 with interferometer hardware & software for topography measurement and export of 3D data.

More Information

Confocal Microscopy

PRO-CON
Microscope confocal module as an upgrade for high resolution 3D Metrology.

More Information

Leica DM8000

Inspection Microscope Leica DM8000 MCS. Modified mikroscope for VIS and IR Inspection in incident and transmitted light. Software for semi-automatic wafer & MEMS Inspection.

More Information

 

Thin Film Measuring

More Information

Infrared Systems

More Information